A new algorithm of MEMS displacement measurement based on gray scale

Yuan Luo; Xiang Lai; Yi Zhang

doi:10.1117/12.2196785

8 October 2015 A new algorithm of MEMS displacement measurement based on gray scale

Yuan Luo, Xiang Lai, Yi Zhang

Proceedings Volume 9677, AOPC 2015: Optical Test, Measurement, and Equipment; 967704 (2015) https://doi.org/10.1117/12.2196785
Event: Applied Optics and Photonics China (AOPC2015), 2015, Beijing, China

Abstract

A non-matching algorithm displacement measurement based on gray scale is proposed in this paper in order to realize the measurement of displacement of MEMS micro structures with high precision. In this method, Against the clear sequences of moving image are obtained by imaging technology of strobe lighting. First, the region of interest(ROI) are selected from still images and stroboscopic images and use bilinear interpolation in the two regions. Moreover, characteristic curve of gray value are generated along a single direction after interpolated. Finally, the difference between the two characteristic curves of gray value in ROI are calculated. At the same time, the error caused by image contrast and brightness is compensated and optimized the detection results. The experimental results indicate that with this method, the precision of the measurement of MEMS micro structures in-plane displacement can reach sub-pixel level, which can obtain the displacement of MEMS in real time with high precision.

Citation Download Citation

Yuan Luo, Xiang Lai, and Yi Zhang "A new algorithm of MEMS displacement measurement based on gray scale", Proc. SPIE 9677, AOPC 2015: Optical Test, Measurement, and Equipment, 967704 (8 October 2015); https://doi.org/10.1117/12.2196785

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