The impact of fabrication errors of double-layer BOE on diffraction efficiency

Zebin Ma; Fuzeng Kang; Hao Wang

doi:10.1117/12.2242497

25 October 2016 The impact of fabrication errors of double-layer BOE on diffraction efficiency

Zebin Ma, Fuzeng Kang, Hao Wang

Proceedings Volume 9685, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials; 96850H (2016) https://doi.org/10.1117/12.2242497
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

With the development of optical technology, optical instruments become smaller and more integrated. Because of the high diffraction efficiency and light weight, binary optical elements become more and more popular. Binary optical elements can only blaze at one wavelength, it has high diffraction efficiency at design wavelength. But the diffraction efficiency of binary optical elements will decrease quickly with the change of wavelength. And this situation will have a big impact on image quality. Since double-layer BOE can blaze at two wavelengths, it has high diffraction efficiency at wide spectral bandwidth. There are kinds of fabrication errors. Based on scalar diffraction theory, this paper analyzes the diffraction efficiency of double-layer BOE with fabrication errors and simulates it in MATLAB. Simulation shows the diffraction efficiency decreases quickly if the depth errors of two layers are opposite, and this situation should be avoided. As for periodic errors, tilt errors and angular errors, these fabrication errors have different impact of double-layer BOE on diffraction efficiency.

Citation Download Citation

Zebin Ma, Fuzeng Kang, and Hao Wang "The impact of fabrication errors of double-layer BOE on diffraction efficiency", Proc. SPIE 9685, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 96850H (25 October 2016); https://doi.org/10.1117/12.2242497

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KEYWORDS

Diffraction

Optical components

Device simulation

Binary data

Integrated optics

Error analysis

MATLAB

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