Ellipsometric Characterization Of Optical Constants For Transparent Materials

S. F Nee; H E Bennett

doi:10.1117/12.948178

16 January 1989 Ellipsometric Characterization Of Optical Constants For Transparent Materials

S. F Nee, H E Bennett

Proceedings Volume 0970, Properties and Characteristics of Optical Glass; (1989) https://doi.org/10.1117/12.948178
Event: 32nd Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1988, San Diego, CA, United States

Abstract

Ellipsometric parameters v and A for glass samples were measured at multiple angles of incidence using an infrared ellipsometer in the null mode. The Fresnel equations were fit to the data using a least-square-fit program to minimize both random and systematic errors in the measurements of the complex optical constants. A fused silica sample with roughness of 0.5 nm rms was used to test the system. The deviations of v and A from theory are at the level of the instrumental errors. The deviations from theory in n and k are less than 0.001 and the best-fit n and k determined for the sample at different wavelengths agree to this accuracy with Handbook values. We conclude that careful ellipsometric characterization can give indices of refraction to three decimal places for materials with low k.

Citation Download Citation

S. F Nee and H E Bennett "Ellipsometric Characterization Of Optical Constants For Transparent Materials", Proc. SPIE 0970, Properties and Characteristics of Optical Glass, (16 January 1989); https://doi.org/10.1117/12.948178

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