A guide to properly select the defocusing distance for accurate solution of transport of intensity equation while testing aspheric surfaces

Peyman Soltani; Ahmad Darudi; Ali Reza Moradi; Javad Amiri; Georges Nehmetallah

doi:10.1117/12.2223208

19 May 2016 A guide to properly select the defocusing distance for accurate solution of transport of intensity equation while testing aspheric surfaces

Peyman Soltani, Ahmad Darudi, Ali Reza Moradi, Javad Amiri, Georges Nehmetallah

Author Affiliations +

Proceedings Volume 9868, Dimensional Optical Metrology and Inspection for Practical Applications V; 986804 (2016) https://doi.org/10.1117/12.2223208
Event: SPIE Commercial + Scientific Sensing and Imaging, 2016, Baltimore, MD, United States

Abstract

In this paper, the Transport of Intensity Equation (TIE) for testing of an aspheric surface is verified experimentally. Using simulation, a proper defocus distance Δ𝑧 that leads to an accurate solution of TIE is estimated whenever the conic constant and configuration of the experiment are known. To verify this procedure a non-nulled experiment for testing an aspheric is used. For verification of the solution, the results are compared with the Shack-Hartmann sensor. The theoretical method and experimental results are compared to validate the results.

Citation Download Citation

Peyman Soltani, Ahmad Darudi, Ali Reza Moradi, Javad Amiri, and Georges Nehmetallah "A guide to properly select the defocusing distance for accurate solution of transport of intensity equation while testing aspheric surfaces", Proc. SPIE 9868, Dimensional Optical Metrology and Inspection for Practical Applications V, 986804 (19 May 2016); https://doi.org/10.1117/12.2223208

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