Effects of ion bombardment on silver/dielectric interfaces with ion assisted e-beam evaporation

David M. Fryauf; Juan J. Diaz Leon; Andrew C. Phillips; Nobuhiko P. Kobayashi

doi:10.1117/12.2238741

26 October 2016 Effects of ion bombardment on silver/dielectric interfaces with ion assisted e-beam evaporation

David M. Fryauf, Juan J. Diaz Leon, Andrew C. Phillips, Nobuhiko P. Kobayashi

Proceedings Volume 9924, Low-Dimensional Materials and Devices 2016; 99240M (2016) https://doi.org/10.1117/12.2238741
Event: SPIE Nanoscience + Engineering, 2016, San Diego, California, United States

Abstract

Silver thin films were deposited by electron beam evaporation for application as telescope mirrors using a custom PVD chamber from the University of California Observatories Astronomical Coatings Lab. The silver (Ag) surface has been bombarded with different ion conditions prior to and during deposition of subsequent dielectric protective barrier layers by ion assisted electron beam evaporation. Ion source gases including nitrogen and argon are used, and dielectric barrier stacks utilizing silicon nitride and titanium dioxide are deposited onto Ag. We report the effects on mirror stack reflectivity spectra caused by ion bombardment parameters with different gases and different holding-time in vacuum prior to ion bombardment. We suggest that evolving Ag surface morphology and surface plasmon resonance coupling contribute to the changing optical properties of the mirror stack.

Conference Presentation

Citation Download Citation

David M. Fryauf, Juan J. Diaz Leon, Andrew C. Phillips, and Nobuhiko P. Kobayashi "Effects of ion bombardment on silver/dielectric interfaces with ion assisted e-beam evaporation", Proc. SPIE 9924, Low-Dimensional Materials and Devices 2016, 99240M (26 October 2016); https://doi.org/10.1117/12.2238741

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available