Extended depth-of-field microscopic structured light system calibration

Liming Chen; Song Zhang

doi:10.1117/12.2623036

30 May 2022 Extended depth-of-field microscopic structured light system calibration

Liming Chen, Song Zhang

Proceedings Volume PC12098, Dimensional Optical Metrology and Inspection for Practical Applications XI; PC1209802 (2022) https://doi.org/10.1117/12.2623036
Event: SPIE Defense + Commercial Sensing, 2022, Orlando, Florida, United States

Abstract

This paper presents a calibration method for an extended-depth-of-field (EDOF) microscopic structured light system using a calibration target with black circles. The method first extends the DOF by the focal sweep technique to achieve a sufficient measurement range. Then, a computational framework is proposed to resolve the phase error problem caused by the black circles. Experimental results indicate that the proposed method works well in microscopic 3D shape measurement.

Conference Presentation

Citation Download Citation

Liming Chen and Song Zhang "Extended depth-of-field microscopic structured light system calibration", Proc. SPIE PC12098, Dimensional Optical Metrology and Inspection for Practical Applications XI, PC1209802 (30 May 2022); https://doi.org/10.1117/12.2623036

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