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3 October 2022 Nano-electromechanically tunable dielectric metasurfaces (Conference Presentation)
Ayse Bilgehan Baspinar, Tianzhe Zheng, Andrei Faraon
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Proceedings Volume PC12195, Metamaterials, Metadevices, and Metasystems 2022; PC121950A (2022) https://doi.org/10.1117/12.2632861
Event: SPIE Nanoscience + Engineering, 2022, San Diego, California, United States
Abstract
Mechanical displacement is one of the mechanisms that can be utilized for realizing tunable optical metasurfaces. We propose nano-electromechanically tunable metasurfaces based on slot mode resonances at telecom wavelength. Utilizing high aspect ratio silicon slabs that can bend towards each other on a substrate, we achieve a robust device that can cover large areas. Upon applying 40 V, the device can achieve 4 nm spectral shift which gives rise to a 70% amplitude modulation. At the cost of a higher power consumption, the proposed device is mechanically robust and can be used in beam steering, modulation and wavefront shaping.
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Ayse Bilgehan Baspinar, Tianzhe Zheng, and Andrei Faraon "Nano-electromechanically tunable dielectric metasurfaces (Conference Presentation)", Proc. SPIE PC12195, Metamaterials, Metadevices, and Metasystems 2022, PC121950A (3 October 2022); https://doi.org/10.1117/12.2632861
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KEYWORDS
Dielectrics
Amplitude modulation
Electrodes
Optical simulations
Refractive index
Silicon
Terahertz radiation
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