Investigation of EUV emission from Sn to rare-earth plasmas in terms of the accuracy of the atomic data and completeness of atomic model

Akira Sasaki

doi:10.1117/12.2657013

14 April 2023 Investigation of EUV emission from Sn to rare-earth plasmas in terms of the accuracy of the atomic data and completeness of atomic model

Akira Sasaki

Author Affiliations +

Proceedings Volume PC12494, Optical and EUV Nanolithography XXXVI; PC124940G (2023) https://doi.org/10.1117/12.2657013
Event: SPIE Advanced Lithography + Patterning, 2023, San Jose, California, United States

Conference Poster

Abstract

EUV emission spectrum from Sn and rare-earth plasmas exhibits complex structure. We study the numerical model of the plasmas to reproduce the emission for the optimization of the sources. We investigate the atomic structure of Sn and rare-earth ions. We investigate the population to the multiply excited states to determine the ionization balance. We also investigate the properties of emission lines to improvement of the accuracy of the calculation. Wavelength and width of UTA (Unresolved Transition Array), which contributes to the EUV emission, are investigated by comparing calculated and experimental spectrum. Emission from multiply excited state, that may cause broadening of the UTA at high densities, is also investigated.

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Akira Sasaki "Investigation of EUV emission from Sn to rare-earth plasmas in terms of the accuracy of the atomic data and completeness of atomic model", Proc. SPIE PC12494, Optical and EUV Nanolithography XXXVI, PC124940G (14 April 2023); https://doi.org/10.1117/12.2657013

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