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31 May 2023 Hybrid integration of monolithic microresonators
Gualtiero Nunzi Conti, Daniele Farnesi, Stefano Pelli, Silvia Soria, Simone Berneschi, Francesco Baldini, Pavel Cheben, Carlos Alonso-Ramos
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Proceedings Volume PC12575, Integrated Optics: Design, Devices, Systems and Applications VII; PC125750B (2023) https://doi.org/10.1117/12.2665652
Event: SPIE Optics + Optoelectronics, 2023, Prague, Czech Republic
Abstract
A review of different integration platforms for high-Q Whispering Gallery Mode bulk resonators is presented, including SOI slotted photonics crystal waveguides, suspended Si photonic crystal membranes or suspended silica waveguides. While each of these approaches allows coupling to a specific monolithic resonator, including those made in low index materials, a novel architecture, based on metamaterial engineered silicon photonics waveguides, provides unique flexibility to couple a wide range of WGM microresonators, enabling the combination of high-performance resonators with complex Si photonic circuits.
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Gualtiero Nunzi Conti, Daniele Farnesi, Stefano Pelli, Silvia Soria, Simone Berneschi, Francesco Baldini, Pavel Cheben, and Carlos Alonso-Ramos "Hybrid integration of monolithic microresonators", Proc. SPIE PC12575, Integrated Optics: Design, Devices, Systems and Applications VII, PC125750B (31 May 2023); https://doi.org/10.1117/12.2665652
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KEYWORDS
Microresonators
Resonators
Silicon photonics
Waveguides
Photonic crystals
Silicon
Metamaterials
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