The nanostructuring on titanium surfaces is studied by low-energy argon ion irradiation. The surfaces are analysed by EBSD for grain orientation mapping, SEM for surface imaging, WLI and AFM for topography characterization, XPS and ToF-SIMS for chemical surface analysis. Under normal incidence specific nanoripple structures are formed, whereas the morphology is defined by the crystallographic conditions only. A characteristic relation between grain orientation and ripple size is elaborated. Experiments on co-deposition with Al, C, Cu, Fe, and Si indicate that Fe impurities influence nanostructuring. The effect of inclined ion incidence shows an overlay between orientation-dependent and process geometry-related structure formation.
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