CMOS Nanophotonics: Converting CMOS chips to active metamaterials

Mohamed El Kabbash; Dirk Englund; Sivan Trajtenberg Mills; Isaac Harris; Ruonan Han

doi:10.1117/12.2682182

4 October 2023 CMOS Nanophotonics: Converting CMOS chips to active metamaterials

Mohamed El Kabbash, Dirk Englund, Sivan Trajtenberg Mills, Isaac Harris, Ruonan Han

Proceedings Volume PC12646, Metamaterials, Metadevices, and Metasystems 2023; PC1264614 (2023) https://doi.org/10.1117/12.2682182
Event: SPIE Nanoscience + Engineering, 2023, San Diego, California, United States

Abstract

We show that metallic wires in CMOS chips can provide dual functionalities as electronic interconnects and as plasmonic/metamaterial devices. We demonstrate plasmonic resonances in a chip fabricated in a bulk Si CMOS foundry (TSMC, 65 nm node). Through minimal post processing, we integrate the designed nanophotonic CMOS chip with liquid crystals and demonstrate a high-speed liquid crystal-based electro-optic modulator.

Conference Presentation

Citation Download Citation

Mohamed El Kabbash, Dirk Englund, Sivan Trajtenberg Mills, Isaac Harris, and Ruonan Han "CMOS Nanophotonics: Converting CMOS chips to active metamaterials", Proc. SPIE PC12646, Metamaterials, Metadevices, and Metasystems 2023, PC1264614 (4 October 2023); https://doi.org/10.1117/12.2682182

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available