A novel way of modelling plasma induced hydrogen permeation in metals

Cederik Meekes; Dagmar A. Wismeijer; Jurjen Emmelkamp; Henk A. Lensen

doi:10.1117/12.2686732

22 November 2023 A novel way of modelling plasma induced hydrogen permeation in metals

Cederik Meekes, Dagmar A. Wismeijer, Jurjen Emmelkamp, Henk A. Lensen

Proceedings Volume PC12750, International Conference on Extreme Ultraviolet Lithography 2023; PC1275005 (2023) https://doi.org/10.1117/12.2686732
Event: SPIE Photomask Technology + EUV Lithography, 2023, Monterey, California, United States

Abstract

In an attempt to better understand the plasma induced permeation of hydrogen in metallic alloys, a COMSOL Multiphysics model is presented. The model simulates the fluxes of molecular hydrogen between ambient and surface, of atomic hydrogen between surface and bulk, and subsequent interstitial atomic hydrogen diffusion. The presentation will focus on the mechanisms and consequences of two distinct types of grain boundaries (GBs). Regular GBs act as diffusion highways, allowing rapid hydrogen permeation deep into the material, and sigma GBs act as roadblocks and trapping sites for hydrogen. The model will be calibrated using electrochemical experiments and validated experimentally using plasma exposure setups at TNO.

Conference Presentation

Citation Download Citation

Cederik Meekes, Dagmar A. Wismeijer, Jurjen Emmelkamp, and Henk A. Lensen "A novel way of modelling plasma induced hydrogen permeation in metals", Proc. SPIE PC12750, International Conference on Extreme Ultraviolet Lithography 2023, PC1275005 (22 November 2023); https://doi.org/10.1117/12.2686732

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