Robotic smoothing of silicon mirrors

Daniel R. Brooks; Jennifer Coniglio; Steve Murty

doi:10.1117/12.2690792

30 November 2023 Robotic smoothing of silicon mirrors

Daniel R. Brooks, Jennifer Coniglio, Steve Murty

Proceedings Volume PC12778, Optifab 2023; PC1277804 (2023) https://doi.org/10.1117/12.2690792
Event: SPIE Optifab, 2023, Rochester, New York, United States

Abstract

The next generation of x-ray synchrotron systems require increasingly precise mirrors to enable diffraction limited focusing of x-ray beams. Due to the extremely short wavelength of the x-ray radiation, coated silicon mirrors must be used at grazing incidence to focus the x-ray beams. These mirrors need to be polished to nanometer level form error and are particularly susceptible to surface texture, including mid-spatial frequency errors and surface roughness. This talk will discuss efforts at Optimax to address this need through advancement of robotic smoothing platforms and processes.

Conference Presentation

Citation Download Citation

Daniel R. Brooks, Jennifer Coniglio, and Steve Murty "Robotic smoothing of silicon mirrors", Proc. SPIE PC12778, Optifab 2023, PC1277804 (30 November 2023); https://doi.org/10.1117/12.2690792

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