You don't need 1nm contours for curvilinear shapes: pixel-based computing is the answer

Abhishek Shendre

doi:10.1117/12.3012439

26 September 2023 You don't need 1nm contours for curvilinear shapes: pixel-based computing is the answer

Abhishek Shendre

Proceedings Volume PC12915, Photomask Japan 2023: XXIX Symposium on Photomask and Next-Generation Lithography Mask Technology; PC129150C (2023) https://doi.org/10.1117/12.3012439
Event: Photomask Japan 2023, 2023, Online Only

Abstract

This conference presentation was prepared for Photomask Japan 2023.

Conference Presentation

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Abhishek Shendre "You don't need 1nm contours for curvilinear shapes: pixel-based computing is the answer", Proc. SPIE PC12915, Photomask Japan 2023: XXIX Symposium on Photomask and Next-Generation Lithography Mask Technology, PC129150C (26 September 2023); https://doi.org/10.1117/12.3012439

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