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10 April 2024 Sustainable semiconductor processing solutions: status and guidelines
Andrea Firrincieli, Emily Gallagher, Herbert Struyf, Frank Holsteyns, Cedric Rolin, Lars-Åke Ragnarsson
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Proceedings Volume PC12958, Advanced Etch Technology and Process Integration for Nanopatterning XIII; (2024) https://doi.org/10.1117/12.3012691
Event: SPIE Advanced Lithography + Patterning, 2024, San Jose, California, United States
Abstract
Environmental sustainability is at the core of many recent studies, offering research opportunities to help meet the ambitious net-zero commitments defined by semiconductor companies. In this context, it is important to analyze the sustainability challenges that different process areas are facing. To enable process engineers to develop sustainable solutions, new metrics, suitable tools and clear targets need to be provided. In this paper we analyze how such tools should be crafted to help the definition of sustainable practices for semiconductors processing.
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(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
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Andrea Firrincieli, Emily Gallagher, Herbert Struyf, Frank Holsteyns, Cedric Rolin, and Lars-Åke Ragnarsson "Sustainable semiconductor processing solutions: status and guidelines", Proc. SPIE PC12958, Advanced Etch Technology and Process Integration for Nanopatterning XIII, (10 April 2024); https://doi.org/10.1117/12.3012691
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KEYWORDS
Sustainability
Etching
Semiconductor manufacturing
Atomic layer deposition
Carbon
Chemical mechanical planarization
Deposition processes
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