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Acid Loss Mechanisms
Book: Field Guide to Optical Lithography
Author(s): Chris A. Mack
Published: 2006
https://doi.org/10.1117/3.665802.p47
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Abstract
This excerpt gives a succinct explanation of Acid Loss Mechanisms.
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KEYWORDS
Diffusion
Polymers
Chemically amplified resists
Chemistry
Contamination
Lithography
Photoresist materials
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