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Equation Summary
Book: Field Guide to Optical Lithography
Author(s): Chris A. Mack
Published: 2006
https://doi.org/10.1117/3.665802.equ
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Abstract
This equation summary lists the key equations used throughout this Field Guide.
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KEYWORDS
Critical dimension metrology
Monochromatic aberrations
Photomasks
Nanoimprint lithography
Optical lithography
Phase measurement
Transmittance
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