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Line Edge Roughness
Book: Field Guide to Optical Lithography
Author(s): Chris A. Mack
Published: 2006
https://doi.org/10.1117/3.665802.p66
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Abstract
This excerpt gives a succinct explanation of Line Edge Roughness.
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KEYWORDS
Line edge roughness
Edge roughness
Lithography
Chemical analysis
Chemical species
Diffusion
Image resolution
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