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Next-Generation Lithography (NGL)
Book: Field Guide to Optical Lithography
Author(s): Chris A. Mack
Published: 2006
https://doi.org/10.1117/3.665802.p87
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Abstract
This excerpt gives a succinct explanation of Next-Generation Lithography (NGL).
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KEYWORDS
Lithography
Electron beam lithography
Mirrors
Extreme ultraviolet
Photomasks
X-ray lithography
X-rays
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