Spatial Coherence and Oblique Illumination

Ebook Topic:
Spatial Coherence and Oblique Illumination

Book: Field Guide to Optical Lithography

Author(s): Chris A. Mack

Published: 2006

https://doi.org/10.1117/3.665802.p18

Abstract

This excerpt gives a succinct explanation of Spatial Coherence and Oblique Illumination.
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KEYWORDS

Spatial coherence

Diffraction

Photomasks

Lithographic illumination

Objectives

Optical lithography

Printing

Keywords/Phrases