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Surface Inhibition
Book: Field Guide to Optical Lithography
Author(s): Chris A. Mack
Published: 2006
https://doi.org/10.1117/3.665802.p50
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Abstract
This excerpt gives a succinct explanation of Surface Inhibition.
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KEYWORDS
Photoresist developing
Absorption
Chemically amplified resists
Contamination
Diffusion
Optical lithography
Oxidation
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