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The Numerical Aperture
Book: Field Guide to Optical Lithography
Author(s): Chris A. Mack
Published: 2006
https://doi.org/10.1117/3.665802.p16
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Abstract
This excerpt gives a succinct explanation of The Numerical Aperture
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KEYWORDS
Diffraction
Photomasks
Image quality
Control systems
Objectives
Optical lithography
Refraction
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