Grazing Incidence Optics and Applications

Grazing Incidence Optics and Applications

Book: Photon Sources for Lithography and Metrology

Editor(s): Vivek Bakshi

Author(s): Ladislav Pina

Published: 2023

https://doi.org/10.1117/3.2638242.ch15A

Author Affiliations +

Abstract

The basic theory of grazing-incidence x-ray optics (GIXO) and its design, raytracing, and mirror testing examples are presented in this chapter. The presented applications include hot plasma research, water-window microscopy, spectroscopy, EUV lithography, and space research.

Online access to SPIE eBooks is limited to subscribing institutions.

CHAPTER 15A
30 PAGES

DOWNLOAD PDF SAVE TO MY LIBRARY

Buy this book on SPIE.org

Buy this book on SPIE.org

Buy this book on SPIE.org

CITATIONS

Explore citations on Lens.org

Advertisement

Advertisement

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

Get copyright permission on Copyright Marketplace

KEYWORDS

Mirrors

X-ray optics

X-rays

Geometrical optics

Reflection

Ray tracing

Optics manufacturing

Show All Keywords

Subscribe to Digital Library

Receive Email Alerts on Newly Released Titles