Improved algorithm for automated alignment of wafers via optimized features location

Michael Parshin; Zeev Zalevsky

doi:10.1117/1.3243882

1 October 2009 Improved algorithm for automated alignment of wafers via optimized features location

Michael Parshin, Zeev Zalevsky

Author Affiliations +

Journal of Electronic Imaging, Vol. 18, Issue 4, 043001 (October 2009). https://doi.org/10.1117/1.3243882

Abstract

We present a new fuzzy logic-based approach for automatic optimized features location. The technique is used for improved automatic alignment and classification of silicon wafers and chips that are used in the electronics industry. The proposed automatic image processing approach was realized and experimentally demonstrated in real industrial application with typical wafers. The automatic features location and grading supported the industrial requirements and could replace human expert-based inspection that currently is performed manually.

©(2009) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Michael Parshin and Zeev Zalevsky "Improved algorithm for automated alignment of wafers via optimized features location," Journal of Electronic Imaging 18(4), 043001 (1 October 2009). https://doi.org/10.1117/1.3243882

Published: 1 October 2009

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