We present a method to passively edge couple multiple optical fibers with silicon nitride waveguides in the visible wavelengths. We efficiently convert the fiber mode to the waveguide mode using an inverse taper mode size converter and support passive alignment using a U-groove that centers the optical fiber to the inverse taper. In our prototypes, we measure a coupling efficiency of −4.2 dB per facet. To reduce light leakage to the silicon substrate, we use a 6-μm oxide layer, which also eliminates the additional processes of undercutting the silicon substrate underneath the waveguide. Furthermore, the U-groove structure has a polished edge surface for coupling, reducing the steps of edge polishing the die. Fabrication of this visible-range edge coupler is complementary metal–oxide–semiconductor-compatible, making it a highly scalable method for passively packaging multiple visible-range integrated photonics devices. |
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CITATIONS
Cited by 4 scholarly publications.
Waveguides
Silicon
Fiber couplers
Optical alignment
Etching
Polishing
Visible radiation