Development Of A Precision Diamond Turning Machine For Fabrication Of Asymmetric Aspheric Mirrors

Shigeo Moriyama; Fumihiko Uchida; Ellchi Seya

doi:10.1117/12.7976800

1 November 1988 Development Of A Precision Diamond Turning Machine For Fabrication Of Asymmetric Aspheric Mirrors

Shigeo Moriyama, Fumihiko Uchida, Ellchi Seya

Author Affiliations +

Optical Engineering, Vol. 27, Issue 11, 271108 (November 1988). https://doi.org/10.1117/12.7976800

Abstract

A high precision, numerically controlled diamond turning machine has been developed for fabrication of asymmetric aspheric mirrors, such as toroidal mirrors used in soft x-ray optics. A workpiece is machined by a single-point diamond tool fly cutter. While the cutting spindle is rotating, cutting depth can be dynamically controlled according to programmed data synchronized with the current rotation angle of the spindle. The programmed data allow generation of a generalized figure. To achieve high figure accuracy, a straightness error compensation control is incorporated with the tool slide. The machine accepts a workpiece with maximum dimensions of 600 mm by 100 mm. A figure accuracy of 0.1 Am and surface roughness of 0.03 um Rmax have been achieved.

Citation Download Citation

Shigeo Moriyama, Fumihiko Uchida, and Ellchi Seya "Development Of A Precision Diamond Turning Machine For Fabrication Of Asymmetric Aspheric Mirrors," Optical Engineering 27(11), 271108 (1 November 1988). https://doi.org/10.1117/12.7976800

Published: 1 November 1988

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