Book Review: Laser Microfabrication: Thin Film Processes and Lithography. Edited by Daniel J. Ehrlich and Jeffrey Y. Tsao.

Larry H. Lin

doi:10.1117/1.OE.29.9.163B

1 September 1990 Book Review: Laser Microfabrication: Thin Film Processes and Lithography. Edited by Daniel J. Ehrlich and Jeffrey Y. Tsao.

Larry H. Lin

Author Affiliations +

Optical Engineering, Vol. 29, Issue 9, (September 1990). https://doi.org/10.1117/1.OE.29.9.163B

There is no online version at this time. Please download the PDF instead.

Citation Download Citation

Larry H. Lin "Book Review: Laser Microfabrication: Thin Film Processes and Lithography. Edited by Daniel J. Ehrlich and Jeffrey Y. Tsao.," Optical Engineering 29(9), (1 September 1990). https://doi.org/10.1117/1.OE.29.9.163B

Published: 1 September 1990

Access the abstract

JOURNAL ARTICLE
-162 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

Subscribe to Digital Library

Receive Erratum Email Alert

Keywords/Phrases

Search In:

Publication Years