Optical flat surfaces: direct interferometric measurements of small-scale irregularities

Parameswaran Hariharan

doi:10.1117/1.601065

1 November 1996 Optical flat surfaces: direct interferometric measurements of small-scale irregularities

Parameswaran Hariharan

Optical Engineering, Vol. 35, Issue 11, (November 1996). https://doi.org/10.1117/1.601065

Some applications of optical surfaces place very stringent limits on small-scale surface irregularities, such as ripples. A method that can be used to make direct interferometric measurements of such smallscale irregularities is described.

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Parameswaran Hariharan "Optical flat surfaces: direct interferometric measurements of small-scale irregularities," Optical Engineering 35(11), (1 November 1996). https://doi.org/10.1117/1.601065

Published: 1 November 1996

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