High-resolution multidimensional displacement monitoring system

Neville K. S. Lee; Yimin Cai; Ajay Joneja

doi:10.1117/1.601521

1 August 1997 High-resolution multidimensional displacement monitoring system

Neville K. S. Lee, Yimin Cai, Ajay Joneja

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Optical Engineering, Vol. 36, Issue 8, (August 1997). https://doi.org/10.1117/1.601521

The possibility of using quadrant detectors to develop a new optical system that can monitor all six degrees of freedom of mechanical workpieces with very high resolution is investigated. A prototype system based on this approach has been designed and built. Although the system is not fully optimized, our proposed system has already demonstrated some promising results. Using a thermally compensated laser source together with a pinhole spatial filtering system, we have demonstrated that lateral resolution better than 50 nm and angular displacement resolution better than 0.25 ?rad is achievable with this system.

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Neville K. S. Lee, Yimin Cai, and Ajay Joneja "High-resolution multidimensional displacement monitoring system," Optical Engineering 36(8), (1 August 1997). https://doi.org/10.1117/1.601521

Published: 1 August 1997

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