Applying branching processes theory for building a statistical model for scanning electron microscope signal

Ira Cohen; Rotem Golan; Stanley R. Rotman

doi:10.1117/1.602358

1 January 2000 Applying branching processes theory for building a statistical model for scanning electron microscope signal

Ira Cohen, Rotem Golan, Stanley R. Rotman

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Optical Engineering, Vol. 39, Issue 1, (January 2000). https://doi.org/10.1117/1.602358

Branching stochastic processes are used to describe random systems such as nuclear chain reactions, population development, and gene propagation. We show that the creation of a scanning-electron- microscope signal can be described as a branching stochastic process. A statistical model is described step by step, as a function of the physical parameters of the process. Using the model, we propose a method for determining the unknown probability distribution of the secondary electron emission. Using this method, a lognormal distribution is shown to approximate the secondary electron emission well, and a Poisson distribution is shown to do so poorly.

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Ira Cohen, Rotem Golan, and Stanley R. Rotman "Applying branching processes theory for building a statistical model for scanning electron microscope signal," Optical Engineering 39(1), (1 January 2000). https://doi.org/10.1117/1.602358

Published: 1 January 2000

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