1 July 2014 Effect of etching on the laser-induced damage properties of artificial defects under 1064-nm laser irradiation
Menglei Lu, Bin Ma, Guangda Zhan, Hongfei Jiao, Xinbin Cheng
Author Affiliations +
Abstract
The cracks and scratches inevitably generated by previous grinding and polishing significantly lower the ability of laser resistance of optical substrates. In this study, the artificial indentations, scratches, and structural defects imbedded with metal nanoparticles are fabricated. The laser-induced damage characteristics of such defects in different types and sizes are investigated qualitatively and quantitatively under 1064-nm laser irradiation. Moreover, the etching effect on improving the laser-induced damage threshold (LIDT) of artificial defects under different etching conditions is analyzed. LIDT is then evaluated according to the etching depth and the morphologies of artificial defects.
© 2014 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2014/$25.00 © 2014 SPIE
Menglei Lu, Bin Ma, Guangda Zhan, Hongfei Jiao, and Xinbin Cheng "Effect of etching on the laser-induced damage properties of artificial defects under 1064-nm laser irradiation," Optical Engineering 53(12), 122505 (1 July 2014). https://doi.org/10.1117/1.OE.53.12.122505
Published: 1 July 2014
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Cited by 8 scholarly publications.
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KEYWORDS
Etching

Laser induced damage

Nanoparticles

Gold

Metals

Laser irradiation

Wet etching

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