Determination of the phase in the center of a circular two-beam interference pattern to determine the displacement of a rough surface

Frans Meijer; Dawid Kucharski; Ewa Stachowska

doi:10.1117/1.OE.57.10.104101

1 October 2018 Determination of the phase in the center of a circular two-beam interference pattern to determine the displacement of a rough surface

Frans Meijer, Dawid Kucharski, Ewa Stachowska

Author Affiliations +

Optical Engineering, Vol. 57, Issue 10, 104101 (October 2018). https://doi.org/10.1117/1.OE.57.10.104101

Abstract

We propose a fast algorithm to extract the phase in the center of an interferogram with circular fringes obtained in a simple Michelson interferometer setup with one rough surface. The phase in the center is a linear function of the displacement of an object, which is very advantageous. It avoids the uncertainty in displacement associated with intensity measurements near a maximum or minimum. Also the direction of movement is always clear. The method used also overcomes the problems associated with speckle, unavoidable with a rough surface, common in industrial applications, when using laser as a light source. Using a large number of points in the interferogram to obtain one value largely reduces noise and also increases the accuracy. Displacement is measured with an accuracy <10 nm.

Citation Download Citation

Frans Meijer, Dawid Kucharski, and Ewa Stachowska "Determination of the phase in the center of a circular two-beam interference pattern to determine the displacement of a rough surface," Optical Engineering 57(10), 104101 (1 October 2018). https://doi.org/10.1117/1.OE.57.10.104101

Received: 9 May 2018; Accepted: 7 August 2018; Published: 1 October 2018

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available