Measurement of nanoscale displacements using a Mirau white-light interference microscope and an inclined flat surface

Nhue Nguyen Phan; Hai Hoang Le; Dung Chi Duong; Duong Van Ta

doi:10.1117/1.OE.58.6.064106

20 June 2019 Measurement of nanoscale displacements using a Mirau white-light interference microscope and an inclined flat surface

Nhue Nguyen Phan, Hai Hoang Le, Dung Chi Duong, Duong Van Ta

Author Affiliations +

Optical Engineering, Vol. 58, Issue 6, 064106 (June 2019). https://doi.org/10.1117/1.OE.58.6.064106

Abstract

Measuring nanoscale displacement is crucial for optical nanometrology. We report an approach to measure vertical nanoscale movements using a Mirau white-light interference microscope. Our technique is different compared with conventional methods. The vertical nanoscale displacement is determined by analyzing interference patterns in the x direction (instead of common z direction) via an inclined surface, which reduces the processing time. By analyzing the obtained interference images, which appear at two successive positions of an inclined flat surface, the maxima of interference signals and the tilt angle are determined. From these two parameters, the displacement is calculated. Using this approach, the transition of several tens of nanometers can be measured. We experimentally investigate the movement of a piezoelectric transducer and the obtained result agrees well with that provided by the manufacturer. Our finding is highly beneficial for optical measurements and surface topography.

Citation Download Citation

Nhue Nguyen Phan, Hai Hoang Le, Dung Chi Duong, and Duong Van Ta "Measurement of nanoscale displacements using a Mirau white-light interference microscope and an inclined flat surface," Optical Engineering 58(6), 064106 (20 June 2019). https://doi.org/10.1117/1.OE.58.6.064106

Received: 17 March 2019; Accepted: 6 June 2019; Published: 20 June 2019

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