31 December 2021 Single-shot 3D profilometry using a color imaging polarimeter
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Abstract

We demonstrate a single-shot uniaxial three-dimensional (3D) profilometry system that illuminates a sample with a color structured polarization pattern with an axial chromatic aberration. We have previously shown that real-time 3D shape measurement can be performed without the occlusion problem using a polarization camera and a monochromatic polarized pattern. Here, we show that it is possible to double the depth range of the system, with no tradeoff in depth resolution, measurement speed, or accuracy, using color pattern projection and an RGB polarization camera. We present the measurement principles of the system and show the results of a real-time 3D profilometry experiment for a sample with a deep hole.

© 2021 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2021/$28.00 © 2021 SPIE
Yuuki Maeda, Shuhei Shibata, Nathan A. Hagen, and Yukitoshi Otani "Single-shot 3D profilometry using a color imaging polarimeter," Optical Engineering 60(12), 124115 (31 December 2021). https://doi.org/10.1117/1.OE.60.12.124115
Received: 11 August 2021; Accepted: 14 December 2021; Published: 31 December 2021
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KEYWORDS
Polarization

3D metrology

Spatial light modulators

3D image processing

Imaging systems

Color imaging

Polarimetry

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