17 May 2022 Fabrication of the Fabry–Pérot cavity with acrylate AB glue film via dual pressure assistance for humidity sensing
Xiaolei Wang, Mengfan Zhang, Shaoping Wen, Qian Yang, Guanjun Wang, Benguo Yu
Author Affiliations +
Abstract

A method for fabricating a thin film Fabry–Pérot (F–P) cavity via dual pressure-assisted acrylate AB glue was studied. The method pressurizes both the acrylate AB glue to generate bubbles and the subsequent inflated film to make it thinner and more sensitive. The F–P cavity was fabricated by attaching the ultrathin film to a glass tube end face and a single-mode fiber in the glass tube to form a two-beam interference model. On the basis of two cycles and several repeated experiments for the humidity gradient, the linear and stable characteristics, and the humidity sensitivity of the F–P cavity with a thin film was demonstrated. The humidity sensitivity was 80.68 pm/% RH and 82.17 pm/% RH under two rising humidity experiments. Acting as the humidity sensing material for the first time, the acrylate AB glue film of the F–P cavity shows good stability and repeatability. In addition, the dual pressure-assisted method introduces a way to produce fiber-optic sensors with ultrathin film.

© 2022 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2022/$28.00 © 2022 SPIE
Xiaolei Wang, Mengfan Zhang, Shaoping Wen, Qian Yang, Guanjun Wang, and Benguo Yu "Fabrication of the Fabry–Pérot cavity with acrylate AB glue film via dual pressure assistance for humidity sensing," Optical Engineering 61(5), 057102 (17 May 2022). https://doi.org/10.1117/1.OE.61.5.057102
Received: 21 March 2022; Accepted: 29 April 2022; Published: 17 May 2022
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KEYWORDS
Humidity

Sensors

Fiber Bragg gratings

Glasses

Fiber optics sensors

Thin films

Environmental sensing

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