Dr. Antônio A.G. Von Zuben Profile

Dr. Antônio A.G. Von Zuben

at Univ of Campinas

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Publications (2)

Proceedings Article | 4 March 2019 Paper

Comparative study between wet and dry etching of silicon for microchannels fabrication

G. Cirino, L. A. Barea, R. Mansano, P. Verdonck, A. von Zuben, N. Frateschi, J. Diniz

Proceedings Volume 10930, 1093015 (2019) https://doi.org/10.1117/12.2506804

KEYWORDS: Silicon, Dry etching, Wet etching, Etching, Photomasks, Aluminum, Semiconducting wafers, Oxides, Plasma, Surface plasmons

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Proceedings Article | 22 February 2018 Paper

Photonic molecules for application in silicon-on-insulator optical sensors

Luis A. Barea, Mario C. M. Souza, Andre Moras, Alvaro R. Catellan, Giuseppe Cirino, Antonio A. Von Zuben, Jose W. Bassani, Newton Frateschi

Proceedings Volume 10537, 105371B (2018) https://doi.org/10.1117/12.2287844

KEYWORDS: Sensors, Resonators, Waveguides, Refractive index, Cladding, Molecular photonics, Optical sensors, Silicon, Optical microcavities, Microrings

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