Béatrice Hémard
at Univ Grenoble Alpes
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | 12 June 2023
Fabien Laulagnet, Jacques-Alexandre Dallery, Laurent Pain, Michael May, Béatrice Hémard, Franck Garlet, Isabelle Servin, Chiara Sabbione
JM3, Vol. 22, Issue 04, 041404, (June 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.4.041404
KEYWORDS: Electron beam direct write lithography, Lithography, Semiconducting wafers, Electron beam lithography, Optical lithography, Optical alignment, Photoresist processing, Design and modelling, Overlay metrology, Silicon

Proceedings Article | 1 May 2023 Presentation + Paper
Fabien Laulagnet, Jacques-Alexandre Dallery, Laurent Pain, Michael May, Beatrice Hémard, Franck Garlet, Isabelle Servin, Chiara Sabbione
Proceedings Volume 12497, 1249706 (2023) https://doi.org/10.1117/12.2658273
KEYWORDS: Electron beam direct write lithography, Lithography, Semiconducting wafers, Electron beam lithography, Optical alignment, Overlay metrology, Optical lithography, Design and modelling, Photoresist processing, Deep ultraviolet

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