Dr. Maialen Larrañaga
at ASML Netherlands B. V.
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 26 March 2019 Paper
Leon van Dijk, Faegheh Hasibi, Maialen Larrañaga, Anne Pastol, Auguste Lam, Richard van Haren
Proceedings Volume 10959, 109591H (2019) https://doi.org/10.1117/12.2515185
KEYWORDS: Overlay metrology, Scanners, Semiconducting wafers, Metrology, Machine learning, Neural networks

Proceedings Article | 19 September 2018 Paper
Faegheh Hasibi, Leon van Dijk, Maialen Larrañaga, Anne Pastol, Auguste Lam, Richard van Haren
Proceedings Volume 10775, 107750X (2018) https://doi.org/10.1117/12.2500239
KEYWORDS: Overlay metrology, Semiconducting wafers, Machine learning, Scanners, Neural networks, Data modeling, Metrology, Performance modeling

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top