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Paula Päivike
at Beneq Oy
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Publications (2)
Proceedings Article | 16 March 2023 Presentation
Spatial atomic layer deposition: a new revolution in ultra-fast production of conformal oxide-based optical coatings (Conference Presentation)
John-Olof Rönn, Sauli Virtanen, Paula Päivike, Philipp Maydannik, Kalle Niiranen, Sami Sneck
Proceedings Volume PC12422, PC124220T (2023) https://doi.org/10.1117/12.2647299
KEYWORDS: Atomic layer deposition, Ultrafast phenomena, Optical coatings, Thin films, Thin film deposition, Waveguides, Surface roughness, Silica, Lenses, Laser damage threshold
Proceedings Article | 28 October 2021 Presentation
Spatial atomic layer deposition: a new revolution in high-volume manufacturing of plasma-enhanced thin films
John-Olof Rönn, Sauli Virtanen, Paula Päivike, Mikko Konttinen, Kalle Niiranen, Mikael Saarniheimo, Sami Sneck
Proceedings Volume 11889, 118890J (2021) https://doi.org/10.1117/12.2602662
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