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1 April 2022 The formation of periodic micro-cup structures on silicone rubber surface by 193 nm ArF excimer laser irradiation
Kaede Iwasaki, Tsuyoshi Yoshida, Masayuki Okoshi
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Proceedings Volume PC11988, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVII; PC1198808 (2022) https://doi.org/10.1117/12.2607201
Event: SPIE LASE, 2022, San Francisco, California, United States
Abstract
Our laboratory has reported that periodic micro swelling structures on silicone rubber surfaces are photochemically formed, and the surface has superhydrophobicity. At the conference, the formation of cup-shaped structures on the top of periodic micro swelling structures on silicone rubber surface by 193 nm ArF excimer laser irradiation will be reported. The micro-cup structure is formed by irradiating the silicone rubber with silica microspheres aligned in a single layer with the 193 nm ArF excimer laser. The formation method and the nature of the micro-cup structure will be discussed.
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Kaede Iwasaki, Tsuyoshi Yoshida, and Masayuki Okoshi "The formation of periodic micro-cup structures on silicone rubber surface by 193 nm ArF excimer laser irradiation", Proc. SPIE PC11988, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVII, PC1198808 (1 April 2022); https://doi.org/10.1117/12.2607201
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KEYWORDS
Silicon
Excimer lasers
Semiconductor lasers
Silica
Pulsed laser operation
Wet etching
Etching
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