Heterogeneous integration of thin film compound semiconductor lasers and SU8 waveguides on SiO2/Si

Sabarni Palit; Jeremy Kirch; Luke Mawst; Thomas Kuech; Nan Marie Jokerst

doi:10.1117/12.842379

15 February 2010 Heterogeneous integration of thin film compound semiconductor lasers and SU8 waveguides on SiO₂/Si

Sabarni Palit, Jeremy Kirch, Luke Mawst, Thomas Kuech, Nan Marie Jokerst

Proceedings Volume 7607, Optoelectronic Interconnects and Component Integration IX; 76070I (2010) https://doi.org/10.1117/12.842379
Event: SPIE OPTO, 2010, San Francisco, California, United States

Abstract

We present the heterogeneous integration of a 3.8 μm thick InGaAs/GaAs edge emitting laser that was metal-metal bonded to SiO₂/Si and end-fire coupled into a 2.8 μm thick tapered SU8 polymer waveguide integrated on the same substrate. The system was driven in pulsed mode and the waveguide output was captured on an IR imaging array to characterize the mode. The waveguide output was also coupled into a multimode fiber, and into an optical head and spectrum analyzer, indicating lasing at ~997 nm and a threshold current density of 250 A/cm².

Citation Download Citation

Sabarni Palit, Jeremy Kirch, Luke Mawst, Thomas Kuech, and Nan Marie Jokerst "Heterogeneous integration of thin film compound semiconductor lasers and SU8 waveguides on SiO₂/Si", Proc. SPIE 7607, Optoelectronic Interconnects and Component Integration IX, 76070I (15 February 2010); https://doi.org/10.1117/12.842379

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