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Quartz-enhanced photoacoustic spectroscopy (QEPAS) is one of the most efficient ways to obtain sensitive, selective, robust gas sensors, where the signal can be given with a fast response and measured continuously. The main drawback of QEPAS comes from using a quartz tuning fork (QTF) as a mechanical transducer. QTF is not designed for photoacoustic gas sensing, and its further integration is limited. We propose a silicon resonant MEMS based on a capacitive transduction mechanism with a limit of detection comparable to that of a QTF. This sensor is potentially an efficient sound wave transducer that can advantageously replace a QTF
Wioletta Trzpil,Diba Ayache,Roman Rousseau,Julien Charensol,Aurore Vicet, andMichael Bahriz
"A silicon micromechanical resonator with capacitive transduction for laser-based photoacoustic spectroscopy", Proc. SPIE PC12009, Quantum Sensing and Nano Electronics and Photonics XVIII, PC120090K (5 March 2022); https://doi.org/10.1117/12.2622480
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Wioletta Trzpil, Diba Ayache, Roman Rousseau, Julien Charensol, Aurore Vicet, Michael Bahriz, "A silicon micromechanical resonator with capacitive transduction for laser-based photoacoustic spectroscopy," Proc. SPIE PC12009, Quantum Sensing and Nano Electronics and Photonics XVIII, PC120090K (5 March 2022); https://doi.org/10.1117/12.2622480