A capacitive resonant MOEMS on silicon for photoacoustic spectroscopy

Wioletta Trzpil; Roman Rousseau; Diba Ayache; Julien Charensol; Aurore Vicet; Michael Bahriz

doi:10.1117/12.2622482

9 March 2022 A capacitive resonant MOEMS on silicon for photoacoustic spectroscopy

Wioletta Trzpil, Roman Rousseau, Diba Ayache, Julien Charensol, Aurore Vicet, Michael Bahriz

Proceedings Volume PC12013, MOEMS and Miniaturized Systems XXI; PC1201308 (2022) https://doi.org/10.1117/12.2622482
Event: SPIE OPTO, 2022, San Francisco, California, United States

Abstract

Quartz-enhanced photoacoustic spectroscopy (QEPAS) is one of the most efficient ways to obtain sensitive, selective, robust gas sensors, where the signal can be given with a fast response and measured continuously. The main drawback of QEPAS comes from using a quartz tuning fork (QTF) as a mechanical transducer. QTF is not designed for photoacoustic gas sensing, and its further integration is limited. We propose a silicon resonant MEMS based on a capacitive transduction mechanism with a limit of detection comparable to that of a QTF. This sensor is potentially an efficient sound wave transducer that can advantageously replace a QTF

Conference Presentation

Citation Download Citation

Wioletta Trzpil, Roman Rousseau, Diba Ayache, Julien Charensol, Aurore Vicet, and Michael Bahriz "A capacitive resonant MOEMS on silicon for photoacoustic spectroscopy", Proc. SPIE PC12013, MOEMS and Miniaturized Systems XXI, PC1201308 (9 March 2022); https://doi.org/10.1117/12.2622482

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