Presentation
13 March 2024 Laser chemical processing of layered films and etching of semiconductors
Author Affiliations +
Abstract
This presentation summarizes recent work at the Laser Thermal Laboratory on the laser-aided processing and functionalization of two-dimensional (2D) layered materials and the laser chemical processing of semiconductors.
Conference Presentation
© (2024) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Costas P. Grigoropoulos, Yoonsoo Rho, Matthew Eliceiri, and Runxuan Li "Laser chemical processing of layered films and etching of semiconductors", Proc. SPIE PC12874, Nanoscale and Quantum Materials: From Synthesis and Laser Processing to Applications 2024, PC1287402 (13 March 2024); https://doi.org/10.1117/12.3004187
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KEYWORDS
Laser processing

Chemical lasers

Semiconductor lasers

Chemical reactions

Etching

Semiconductors

Atomic layer etching

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