Integrated Microsensors: Design And Fabrication Constraints

Rosemary L Smith

doi:10.1117/12.945222

8 April 1988 Integrated Microsensors: Design And Fabrication Constraints

Rosemary L Smith

Proceedings Volume 0904, Microsensors and Catheter-Based Imaging Technology; (1988) https://doi.org/10.1117/12.945222
Event: 1988 Los Angeles Symposium: O-E/LASE '88, 1988, Los Angeles, CA, United States

Abstract

This presentation addresses critical issues one faces in the design and fabrication of microsensors and associated 'on chip' circuitry. It focuses on the constraints which result from the merging of microelectronics and sensors to yield the integrated microsensor. Guidelines for successful microsensor design are given.

Citation Download Citation

Rosemary L Smith "Integrated Microsensors: Design And Fabrication Constraints", Proc. SPIE 0904, Microsensors and Catheter-Based Imaging Technology, (8 April 1988); https://doi.org/10.1117/12.945222

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