Paper
13 July 1994 Small inertial measurement units: sources of error and limitations on accuracy
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Abstract
Limits on the precision of small accelerometers for inertial measurement units are enumerated and discussed. Scaling laws and errors which affect the precision are discussed in terms of tradeoffs between size, sensitivity, and cost. Thermal noise and displacement transducer sensitivity constrain the size of an accelerometer for a given sensitivity, and error correction for inertial navigation leads to a tradeoff between cost and precision. Emphasis is placed on micromachined silicon accelerometers as a potential technology for manufacturing low cost, precision sensors, and sample calculations are given to illustrate the principles.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael E. Hoenk "Small inertial measurement units: sources of error and limitations on accuracy", Proc. SPIE 2220, Sensing, Imaging, and Vision for Control and Guidance of Aerospace Vehicles, (13 July 1994); https://doi.org/10.1117/12.179603
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KEYWORDS
Silicon

Information operations

Transducers

Sensors

Capacitance

Electronics

Aerospace engineering

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