Capacitive pressure sensor for MEMS

Amita Gupta; Amir Ahmad; Ranvir Singh

doi:10.1117/12.514570

14 October 2003 Capacitive pressure sensor for MEMS

Amita Gupta, Amir Ahmad, Ranvir Singh

Proceedings Volume 5062, Smart Materials, Structures, and Systems; (2003) https://doi.org/10.1117/12.514570
Event: Smart Materials, Structures, and Systems, 2002, Bangalore, India

Abstract

Pressure sensors have widespread applications in medicine and automotive industry. Specific designs and mounting arrangements vary considerably, ranging from small, sensitive catheter-tip transducers used within the heart to the bigger, rugged devices needed for industrial process control. A capacitive type of pressure sensor has been made using bulk silicon micromachining. It converts the diaphragm deformation, corresponding to pressure, into a change of capacitance. The total change in capacitance is the integral of the change of capacitance of each small area on the diaphragm. The change of capacitance δC/C is measured as a function of deformation or pressure. The diaphragm deflection has been modelled using Intellisuite sofware.

Citation Download Citation

Amita Gupta, Amir Ahmad, and Ranvir Singh "Capacitive pressure sensor for MEMS", Proc. SPIE 5062, Smart Materials, Structures, and Systems, (14 October 2003); https://doi.org/10.1117/12.514570

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