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30 March 2017 Process resilient overlay target designs for advanced memory manufacture
Joonseuk Lee, Mirim Jung, Honggoo Lee, Youngsik Kim, Sangjun Han, Michael E. Adel, Tal Itzkovich, Vladimir Levinski, Victoria Naipak, Anna Golotsvan, Amnon Manassen, Yuri Paskover, Tom Leviant, Efi Megged, Myungjun Lee, Mark D. Smith, Do-Hwa Lee, DongSub Choi, Zephyr Liu
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Proceedings Volume 10145, Metrology, Inspection, and Process Control for Microlithography XXXI; 1014524 (2017) https://doi.org/10.1117/12.2258376
Event: SPIE Advanced Lithography, 2017, San Jose, California, United States
Abstract
In recent years, lithographic printability of overlay metrology targets for memory applications has emerged as a significant issue. Lithographic illumination conditions such as extreme dipole, required to achieve the tightest possible pitches in DRAM pose a significant process window challenge to the metrology target design. Furthermore, the design is also required to track scanner aberration induced pattern placement errors of the device structure. Previous workiii, has shown that the above requirements have driven a design optimization methodology which needs to be tailored for every lithographic and integration scheme, in particular self-aligned double and quadruple patterning methods. In this publication we will report on the results of a new target design technique and show some example target structures which, while achieving the requirements specified above, address a further critical design criterion – that of process resilience.
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Joonseuk Lee, Mirim Jung, Honggoo Lee, Youngsik Kim, Sangjun Han, Michael E. Adel, Tal Itzkovich, Vladimir Levinski, Victoria Naipak, Anna Golotsvan, Amnon Manassen, Yuri Paskover, Tom Leviant, Efi Megged, Myungjun Lee, Mark D. Smith, Do-Hwa Lee, DongSub Choi, and Zephyr Liu "Process resilient overlay target designs for advanced memory manufacture", Proc. SPIE 10145, Metrology, Inspection, and Process Control for Microlithography XXXI, 1014524 (30 March 2017); https://doi.org/10.1117/12.2258376
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KEYWORDS
Overlay metrology
Semiconducting wafers
Polarization
Critical dimension metrology
Image segmentation
Lithography
Metrology
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