Critical Issues In The Design Of Inspection Systems For Clean Surfaces

David M. Berg; Joachim Bunkenburg; Charles J. Cushing

doi:10.1117/12.950963

1 May 1989 Critical Issues In The Design Of Inspection Systems For Clean Surfaces

David M. Berg, Joachim Bunkenburg, Charles J. Cushing

Proceedings Volume 1036, Precision Instrument Design; (1989) https://doi.org/10.1117/12.950963
Event: SPIE Advanced Processing Technologies for Optical and Electronic Devices (colocated wth OPTCON), 1988, Santa Clara, CA, United States

Abstract

Surface defect measurements are important in several industries. In semiconductor manufacturing, surface defect measurements are made during final inspection by the slice vendor, at incoming inspection by the circuit fabricator and before certain key operations. The principal requirements of the inspection systems are a low defect diameter detection threshold, good repeatability, high throughput and that they add very few particles of critical diameter. These functional requirements lead to sometimes conflicting design requirements for the optical measuring subsystems. We examine the key design requirements for future inspection equipment, and compare approaches used in commercially available equipment.

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David M. Berg, Joachim Bunkenburg, and Charles J. Cushing "Critical Issues In The Design Of Inspection Systems For Clean Surfaces", Proc. SPIE 1036, Precision Instrument Design, (1 May 1989); https://doi.org/10.1117/12.950963

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