Characterization of laser optics

Jean M. Bennett

doi:10.1117/12.259941

20 November 1996 Characterization of laser optics

Jean M. Bennett

Proceedings Volume 2870, Third International Workshop on Laser Beam and Optics Characterization; (1996) https://doi.org/10.1117/12.259941
Event: Third International Workshop on Laser Beam and Optics Characterization, 1996, Quebec City, Canada

Abstract

Characterization techniques that are appropriate for detecting surface topographic features on ultra-smooth laser optics are described. Thee include various types of microscopes, optical and mechanical profilers, and instruments to measure light scattering. Two special techniques are emphasized -- total internal reflection microscopy (TIRM) and scanning force microscopy (SFM). The importance of keeping laser optics contamination-free is emphasized.

Citation Download Citation

Jean M. Bennett "Characterization of laser optics", Proc. SPIE 2870, Third International Workshop on Laser Beam and Optics Characterization, (20 November 1996); https://doi.org/10.1117/12.259941

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